DGV

With a lineup ranging from DN 80 to DN 750, our product can be widely used in both semiconductor and display applications. It features a compact design for easy installation. Additionally, an optional two-stage slow pumping function is applied, which can prevent dry pump damage and chamber turbulence.

In addition to the standard specification that mounts on top of a general dry pump, we also supply versions that achieve very fast OPEN-CLOSE operation speed upon customer request, as well as an UHV version that can be mounted on TMP.