DIV

The DIV Series is a direct-acting valve. Compared to conventional link-connection types and L-motion close type valves, it implements direct movement and i-motion close type, achieving remarkable improvements in performance related to noise and vibration. The self-developed "metal o-ring contact structure" further enhances the completeness of the valve.

Additionally, this valve can be opened under differential pressure, which can be expected to improve wafer yield.

DIV Series is suitable for gate valves connected to TMP and CRYO PUMP, and it is widely used in implant and sputtering processes.