Auto Gate Valve (DGV)
DGV Slow Pumping 80~160
- Feature
- Very Low Noise
- Minimize chamber&pump damage
- Very Low Vibration
- Very Easy Set-up
- Very Compact Design
- Very High Purity Valve
- General Specification
- Body Material : SUS 304
- Leak Rate : < 1x10⁻⁹ mbar. l/s (1x10⁻¹⁰ Pa m³/s)
- Vibration : < 0.35㎨
- Operation : 5~8 bar
- Warranty : 200,000 Cycle
- Flange Type : ISO-K, ISO-F, JIS, CF
- Dimension
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