DPV Series

As the use of various gases in increasingly segmented and precise semiconductor processes grows, the amount of powder generated in these processes is also increasing, which negatively affects the lifespan of valves and pumps. The DPV Series valves are designed to minimize the impact from powder generated during these processes.

By applying a protection ring structure and heating gauge that maximizes heating impact, the ingress and adsorption of powder within the valve have been minimized. This can significantly positively influence the lifespan and maintenance of the valve. The DPV Series valves also achieve very fast opening and closing speeds, allowing them to quickly block the flow between the chamber and pump in case of an abnormal situation, thereby minimizing damage.

In particular, the development of a pendulum type and Dasan’s unique blade structure has minimized noise and vibration of the valve.

The DPV Series can be used in a wide range of applications and is widely used in semiconductor processes such as CVD, DIFFUSION and ETCH processes.