Very Low Noise & Vibration
Protective Bellow
Very Compact Design
Longer Lifetime
Very High Purity Valve
 

Body Material : Stainless Steel
Leak rate : < 6 x 10-8mbar.l/s
Operation : 3~8 bar
Warranty : 100,000 Cycle
 

Application Port Dimension : ISO40 ~ ISO320
Application Process : TiCL4, BPSG, Nitride, Wsi, All Toxic Process...